- direct-writing step-and-repeat electron-beam exposure
- Микроэлектроника: непосредственное электронно-лучевое экспонирование с мультипликацией
Универсальный англо-русский словарь. Академик.ру. 2011.
direct-writing step-and-repeat electron-beam exposure
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Contact lithography — Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask in direct contact with a substrate coated with an imaging photoresist layer. Contents 1… … Wikipedia
holography — /heuh log reuh fee/, n. the process or technique of making holograms. [1795 1805; HOLO + GRAPHY] * * * Method of recording or reproducing a three dimensional image, or hologram, by means of a pattern of interference produced using a laser beam.… … Universalium
nanotechnology — /nan euh tek nol euh jee, nay neuh /, n. any technology on the scale of nanometers. [1987] * * * Manipulation of atoms, molecules, and materials to form structures on the scale of nanometres (billionths of a metre). These nanostructures typically … Universalium
analysis — /euh nal euh sis/, n., pl. analyses / seez /. 1. the separating of any material or abstract entity into its constituent elements (opposed to synthesis). 2. this process as a method of studying the nature of something or of determining its… … Universalium
